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针对微机械系统和精细加工技术中现有的振动测量方法存在易受电磁干扰、动态和线性范围窄等诸多问题,本文提出了一种基于一维位置敏感器(PSD)相位检测的振动测量方法,通过激光三角法将被测物体的振动信号转换为光斑在PSD的位置变化,PSD两电极输出的电流相差信号经PSD相位法的信号处理电路转换为与光斑位置成线性关系的直流电压信号,由此确定光斑的位置变化,进而测量物体的振动,且实时信号可以通过示波器或在上位机界面中显示。本文实验测量的平均相对误差为0.89%,最大误差为1.75%,线性度优于1.2%,实现了振动的高精度、高线性度和不受电磁干扰的测量。
In order to solve the problems that existing vibration measurement methods in micromachining system and fine processing technology are susceptible to electromagnetic interference and have narrow dynamic range and linear range, a vibration measurement method based on one-dimensional position sensor (PSD) phase detection is proposed , The laser triangulation method is used to convert the vibration signal of the measured object into a spot whose position changes in the PSD. The current difference signal output by the two electrodes of the PSD is converted into a DC voltage signal with a linear relationship with the spot position by the signal processing circuit of the PSD phase method, This determines the position of the spot changes, and then measure the vibration of objects, and real-time signals through the oscilloscope or display in the host computer interface. The experimental results show that the average relative error is 0.89%, the maximum error is 1.75% and the linearity is better than 1.2%. The high precision, high linearity and non-electromagnetic interference measurement are achieved.