论文部分内容阅读
溅射离子泵之性能决定于它的电离速率。在低压强下，可电离的气体分子数量相应地减少。如果用一种高蒸气压的金属作放电电极，就能消除这个极限。在放电时，高蒸气压的金属电极发生局部加热，从而在气相中释放出大量金属原子。这些金属原子被空间电荷电子电离并被加速轰击到阴极上，结果使抽速提高很多。结果发现，在低于１０－４乇压强范围内电离速率（单位：安培／乇）增加５０％，对空气抽速（单位：升／秒）也增加５０％，这就远远超过现有离子泵的水平。残余气体分析指出，高蒸气压金属对真空系统并不产生污染。
The performance of a sputter ion pump depends on its ionization rate. At low pressure, the number of ionizable gas molecules is correspondingly reduced. If a high vapor pressure metal discharge electrode, you can eliminate this limit. During discharge, the high vapor pressure metal electrode is locally heated, releasing a large amount of metal atoms in the gas phase. These metal atoms are ionized by space charge electrons and accelerated to the cathode, resulting in a much higher pumping speed. As a result, it was found that a 50% increase in ionization rate (unit: Ampere / Torr) within the pressure range of 10-4 Torr and an increase of 50% in air pumping speed (unit: liter / second) far exceeded that of existing ions Pump level. Residual gas analysis points out that high vapor pressure metals do not cause any contamination of the vacuum system.