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根据非平衡热力学耦合模型理论首次计算得到了碳氢氮体系的金刚石生长的非平衡定态相图与近几年在国际上发表的该体系实验结果相符合,可以为今后的实验研究提供定量化的理论依据.根据理论相图讨论了系统压力和体系中氮的添加对金刚石薄膜淀积条件的影响.
According to the theory of non-equilibrium thermodynamic coupling model, the unbalanced stationary phase diagram of the diamond growth of the hydrocarbon-nitrogen system is calculated for the first time and is in good agreement with the experimental results of the system published in recent years, which can be used to quantify future experimental studies The theoretical basis. According to the theoretical phase diagram, the influence of the system pressure and the nitrogen addition on the deposition conditions of the diamond films is discussed.