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采用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了La掺杂的PbTiO3铁电薄膜(PLT),X-射线衍射测量表明PLT薄膜呈高度(100)择优取向,原子力显微镜和扫描电子显微镜测量表明制备的PLT薄膜的表面平整、结构致密。RT66A测量表明PLT薄膜有优良的铁电特性,500kV/cm的外加电场下,剩余极化为10.6μC/cm2,矫顽电场为55kV/cm。用HP4194A分析了薄膜的介电特性。100kHz时的介电常数为652。
La-doped PbTiO3 ferroelectric thin films (PLTs) were prepared on Pt / Ti / SiO2 / Si substrates by sol-gel method. X-ray diffraction measurements showed that the PLT films were highly (100) Scanning electron microscopy measurements showed that the surface of the prepared PLT film was smooth and compact. RT66A measurements show that the PLT film has excellent ferroelectric properties. Under the applied electric field of 500kV / cm, the remanent polarization is 10.6μC / cm2 and the coercive field is 55kV / cm. The dielectric properties of the films were analyzed by HP4194A. The dielectric constant at 100kHz is 652.