论文部分内容阅读
利用碳纳米管的场发射性质,研制了一种新型的真空测量装置。该装置采用了电离规的测量原理,它由碳纳米管阴极、阳极和收集极组成,通过测量离子流与电子流的比值来指示真空度。其中的碳纳米管阴极由碳纳米管长线制成,由于碳纳米管长线的宏观尺度,这种阴极可以高效地制备。在动态真空系统中测试了该装置的计量特性,结果在10-4～10-1 Pa的范围内有良好的线性特征。由于该装置采用了场发射阴极,它的功耗只有约5.5 mW。另外,相比于传统的热发射阴极,该装置没有明显的吸放气效应。这些特点使得它在密封真空器件,如场发射显示器,内部的真空测量中有广泛的应用前景。
Using the field emission properties of carbon nanotubes, a new type of vacuum measuring device was developed. The device uses ionization gauge measurement principle, which consists of carbon nanotube cathode, anode and collector composition, by measuring the ratio of ion to electron flow to indicate the degree of vacuum. The carbon nanotube cathode is made of carbon nanotubes with long lines. Due to the macroscopic scale of the carbon nanotubes, the cathode can be efficiently prepared. The dosing characteristics of the device were tested in a dynamic vacuum system and found to have good linearity over a range of 10-4 to 10-1 Pa. Since the device uses a field emission cathode, it consumes only about 5.5 mW. In addition, the device has no significant evacuation effect compared to conventional heat-emitting cathodes. These features make it a wide range of applications in the field of sealed vacuum devices, such as field emission displays, internal vacuum measurement.