以氟化氢为基础的溶液被广泛地用在扩散前清洗工艺中的二氧化硅清洗与蚀刻中。为降低不同批次之间工艺效果的差别,也就是增加批次与批次之间工艺效果的可重复性,更好地控制氧化物地腐蚀显得尤为重要。自动化的蚀刻控制体系弥补了在线的化学品浓度与反应温度的偏差而达到了精确的蚀刻目标。 Hydrogen fluoride based solutions are widely used in silica cleaning and etching in pre-diffusion cleaning processes. To reduce the difference between the process effects of different batches, which is to increase the repeatability of process effects between batches and batches, it is particularly important to better control the oxide corrosion. Automatic etching control system to make up for the online chemical concentration and reaction temperature deviation to achieve the exact etching target.