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要求工作在10安/厘米~2或更大电流密度下的阴极,具有长寿命、瞬时起动、环境温度工作和小电压调制的能力,这导致场致发射阵阴极(FEA′S)的研制。场致发射阵阴极是排列在绝缘的提拉栅网(extractor grid)内距微孔约1微米处的微型点状锥形发射体阵列。由于加在提拉极上的正电压小(100伏~200伏),邻近空间产生的电场梯度大,加上点状尖端作用的增强,导致了场致发射。由于应用了薄膜精密制造工艺和晶体生长工艺,10~6~10~7个电子枪/厘米~2阵列目前已在三个实验室用不同的制造工艺研制。两个实验室的试验达到10~20安/厘米~2的电流密度。随着技术的进展,已设计出电流密度提高一个数量级的场致发射阵阴极。
Requiring cathodes operating at current densities of 10 A / cm 2 or greater with long life, instantaneous start-up, ambient temperature operation, and low voltage modulation have led to the development of field emission cathode arrays (FEA’s). The field emission array cathode is a miniature array of cone-shaped emitter arrays arranged in an insulated extractor grid about 1 micron from the micropores. Due to the small positive voltage (100V ~ 200V) applied to the pulling electrode, the electric field gradient generated in the adjacent space is large, and the enhancement of the action of the point tip causes the field emission. Due to the thin-film precision manufacturing process and crystal growth process, 10 to 6 to 10 to 7 electron guns / cm to 2 arrays have been developed in three laboratories using different manufacturing processes. The tests in both laboratories reached a current density of 10 to 20 A / cm². As technology advances, cathodes for field emission arrays have been designed that increase the current density by an order of magnitude.