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介绍了一种利用湿法化学腐蚀方法在125mm×125mm硅衬底上制备的具有超低光学减反的效率为12.68%的纳米线表面结构太阳电池。除了表面结构的制备过程,该电池其余的工艺均采用传统生产线工艺(包括铝背场的制备、负电极的制备)。在300～1000nm波段,纳米线结构的反射率低于3%;同时相比金字塔绒面结构,吸收率也提高了近10%。根据外量子效率测试,分析了所制备电池的基本性能,并讨论了纳米表面结构太阳电池比传统金字塔绒面电池效率低的原因。分析表明,合适的钝化及电极制备工艺对纳米表面结构电池性能的提高具有十分重要的作用。
A nanowire surface structure solar cell with ultra-low optical anti-reflection efficiency of 12.68% was fabricated on a 125mm × 125mm silicon substrate by wet chemical etching. Except for the preparation of the surface structure, the remaining processes of the battery are conventional production line processes (including the preparation of an aluminum back field and the preparation of a negative electrode). In the 300-1000 nm band, the reflectance of the nanowire structure is less than 3%, and the absorptivity is also increased by nearly 10% compared with the pyramidal structure of the pyramid. According to the external quantum efficiency test, the basic performance of the prepared battery is analyzed, and the reason why the nano-structured solar cell has lower efficiency than the conventional pyramid supertatine cell is discussed. The analysis shows that proper passivation and electrode preparation process plays an important role in improving the performance of nano-structured surface cells.