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提出了双激光沉积掺杂薄膜技术,利用准分子纳秒激光和飞秒激光分别烧蚀石墨和锗靶材,保持准分子纳秒激光的参数不变,而将飞秒激光的脉冲频率逐次由0提高至500 Hz,在硅基底上获得锗含量逐次增大的掺杂类金刚石膜。实验结果表明:随着锗掺杂量的提高,锗掺杂类金刚石膜的折射率略微增大,消光系数增大7.3倍;表面硬度呈近似的线性降低,降低幅度约为41.3%;内应力呈非线性减小并在某值趋于稳定,降低幅度约为78.1%。牢固度实验结果表明,锗掺杂量的提高可以增强类金刚石膜在基底上的附着性能,但不利于其对溶液的耐腐蚀性。研究结果为不同应用目的的掺杂类金刚石膜及其复合膜层的设计提供了实验基础,且研究方法具有很强的可扩展性,不仅仅限于实验所限薄膜范围。
A dual-laser deposition doping thin film technique is proposed, in which the parameters of the excimer nanosecond laser are kept unchanged by using an excimer nanosecond laser and a femtosecond laser respectively to ablate the graphite and the germanium target, and the pulse frequency of the femtosecond laser is changed successively from 0 to 500 Hz, a doped diamond-like carbon film with successively increasing germanium content is obtained on a silicon substrate. The experimental results show that the refractive index of germanium-doped diamond-like carbon film increases slightly and the extinction coefficient increases by 7.3 times with the increase of the doping amount of germanium. The surface hardness decreases linearly by approximately 41.3%, and the internal stress Non-linearly decreases and tends to be stable at a certain value, decreasing about 78.1%. Firmness test results show that the increase of germanium doping can enhance the DLC film adhesion on the substrate, but not conducive to the corrosion resistance of the solution. The results provide the experimental basis for the design of doped diamond-like carbon films and their composite films for different application purposes, and the research methods have strong scalability, which is not limited to the experimental film limits.