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为实现垂直腔面发射激光器(VCSEL)氧化孔径的精确控制,对垂直腔面发射激光器湿法氧化工艺的氧化速率规律进行了实验研究。在不同的温度下对垂直腔面发射激光器样品进行湿法氧化,氧化后采用扫描电镜(SEM)对氧化层不同氧化深度处生成物组成进行了微区分析。结果表明在不同氧化深度处氧化生成物各元素的组分含量不同,尤其氧元素的组分含量差别较大。分析和讨论了氧化不同阶段的反应类型和反应生成物,并建立了氧化速率随时间变化的数学模型,推导出在湿法氧化过程中,氧化速率随时间按指数规律变化,指出在一定的温度下,氧化时间越长,氧化速率越趋于稳定;适当降低氧化温度,延长氧化时间可提高氧化工艺的可控性与准确性。
In order to achieve the precise control of vertical cavity surface emitting laser (VCSEL) oxidation aperture, the oxidation rate of vertical cavity surface emitting laser in wet oxidation process was experimentally studied. The vertical cavity surface-emitting laser samples were wet-oxidized at different temperatures. After oxidation, the microstructure of the products was analyzed by scanning electron microscopy (SEM) at different oxidation depths. The results show that the content of each element of the oxide is different at different oxidation depths, especially the content of oxygen element is quite different. The reaction types and reaction products in different stages of oxidation were analyzed and discussed. The mathematical model of the oxidation rate with time was established, and the oxidation rate was exponentially changed with time in the wet oxidation process. It was pointed out that at a certain temperature , The longer the oxidation time, the more steady the oxidation rate becomes; the lower the oxidation temperature and the longer the oxidation time can improve the controllability and accuracy of the oxidation process.