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用RGTO方法制备多孔、颗粒状SnO2薄膜;根据SEM观察结果建立简单导电模型,并验证其导电机制主要是晶界导电;研究纯SnO2薄膜及掺杂SnO2薄膜对CO,乙醇等气体的气敏特性。掺Pt的薄膜对CO有很好的气敏响应;选择合适工作温度,可提高灵敏度改善选择性,用此种方法制得的薄膜具有良好的长期稳定性、非常短的响应和恢复时间等特点。
The porous and granular SnO2 thin films were prepared by the RGTO method. The simple conductive model was established according to the SEM observation and the conduction mechanism was mainly grain boundary conductivity. The gas sensing properties of pure SnO2 thin films and doped SnO2 thin films on CO, ethanol and other gases were studied. . The Pt-doped film has a very good gas-sensing response to CO; the choice of a suitable working temperature increases the sensitivity and improves the selectivity, and the film produced by this method has good long-term stability, very short response and recovery time .