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简要介绍了FEI Titan80-300STEM扫描透射电镜中装配的Wien-filter型能量单色器(monochromator).文章特别指出,装配有能量单色器的FEI Titan80-300STEM扫描透射电镜,可以直接给出高能量分辨率(~0.1eV)的电子能量损失谱.利用高分辨电子能量损失谱,在高能损失区,对于K或L能级自然宽度(natural width of energylevel)小于0.5eV的元素,可以获得更细致的的近限精细结构(energy-loss near-edge structure),更有利于解析其电子结构;在低能损失区,可以用于精确地确定半导体材料的带隙(bandgap)以及p型掺杂引起的带隙能的变化.
The Wien-filter type energy monochromator is briefly introduced in the FEI Titan80-300 SEM Scanning Transmission Electron Microscope. In particular, the FEI Titan80-300 SEM Scanning Transmission Electron Microscope equipped with an energy monochromator gives a direct indication of the high energy Resolution (~ 0.1eV) electron energy loss spectrum.Using high-resolution electron energy loss spectroscopy, for energetic loss regions, for elements with a natural width of energylevel of less than 0.5eV, more detailed Of the energy-loss near-edge structure is more conducive to the analysis of its electronic structure; in the low energy loss zone, can be used to accurately determine the semiconductor material bandgap (bandgap) and p-type doping caused Band gap energy changes.