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研究了在150 ℃~460 ℃范围内氮离子注入00Cr17Ni14Mo2奥氏体不锈钢后,注入层的氮分布和组织结构。结果表明,注入层的氮分布和表面组织结构依赖于注入温度。注入温度高于250 ℃,氮发生了明显的扩散,氮离子的表观扩散系数与温度的关系较好地满足Arrhenius方程;与低温离子注入相比,表面含氮层深度呈数量级的增加,且氮离子的保持剂量率随注入温度升高而增加。注入温度高于350 ℃时,含氮层的含氮量与晶向有关,其组织主要由膨胀奥氏体组成。
The nitrogen distribution and microstructure of the implanted layer after nitrogen ion implantation into the austenitic stainless steel 00Cr17Ni14Mo2 were studied in the range of 150 ℃ ~ 460 ℃. The results show that the nitrogen distribution and the surface texture of the implanted layer depend on the injection temperature. The apparent diffusion coefficient of nitrogen ions and temperature are better than the Arrhenius equation for the injection temperature above 250 ℃. The depth of surface nitrogen-containing layer increases by an order of magnitude compared with that of low-temperature ion implantation The retention dose rate of nitrogen ions increases with the injection temperature. When the injection temperature is higher than 350 ℃, the nitrogen content of the nitrogen-containing layer is related to the crystal orientation, and the microstructure is mainly composed of expanded austenite.