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介绍了一种新型半导体效应参数测量装置 ,以 90 Sr- 90 Y为模拟源辐射装置与半导体参数测试仪共同组成半导体器件辐射效应测量系统 ,可进行各类器件和电路总剂量辐照效应测量与分析 ,系统实现了在线测量和辐射剂量率的连续调节 ,特别适宜于对卫星空间辐射环境的模拟。利用系统开展了几种 CMOS器件辐射效应实验研究 ,给出了器件在 90 Sr- 90 Y源低剂量率辐射条件下的失效剂量。
A new type of semiconductor effect parameter measurement device is introduced. The 90 Sr-90 Y analog source radiation device and the semiconductor parameter tester are used to form the radiation effect measurement system of the semiconductor device, which can measure the total dose radiation effect of various devices and circuits and The system realizes continuous measurement of on-line measurement and radiation dose rate, and is especially suitable for simulating the radiation environment of satellite space. Several experimental studies on the radiation effects of CMOS devices were carried out by using the system, and the failure doses of the devices under low radiation dose of 90 Sr-90 Y source were given.