【摘 要】
：
Surface passivation methods for porous Si (PS) surfaces, I.e., depositing diamond film or diamond-like carbon (DLC)film on PS surfaces, were attempted. Two emis
【机 构】
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School of Materials Science & Engineering
【基金项目】
：
Shanghai Foundation of Applied Materials Research & Development;国家自然科学基金;Rising Star Project of Shanghai
论文部分内容阅读
Surface passivation methods for porous Si (PS) surfaces, I.e., depositing diamond film or diamond-like carbon (DLC)film on PS surfaces, were attempted. Two emission bands, weak blue band and strong red band existed in the PL spectrum of diamond film coated on PS, were discovered by the photoluminescence measurements. The luminescent mechanism and stability were discussed. The results indicated that diamond film may stabilize the PL wavelength and intensity of PS, and therefore could become a promising passivation film of porous Si. The PL properties of PS coated by DLC films, including hydrogenated diamond like carbon (DLC:H) film and nitrogen doped DLC film (DLC:N) were also studied in this paper. The DLC films may stabilize the PL of PS, but the photoluminescent intensity was obviously weaker than that of diamond film coated PS.
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