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为满足紫外告警系统成像需要,实现对太阳光谱盲区光子图像接受检测的作用,研制了一种紫外成像滤光片。采用电子束(EB)加热蒸发和离子辅助沉积(IAD)的方法,在熔融石英(JGS1)基底上镀氧化铪、氟化镁、紫外二氧化硅等薄膜材料,并借助石英晶体振荡法和光电极值法相结合的方式监控膜层厚度,镀制了满足入射角0°～25°范围内240～280nm波段透射、300～620nm波段抑制的紫外滤光片。通过对膜系优化设计和工艺参数的研究,解决了薄膜脱膜、膜厚的精确控制、材料的吸收等问题。制备的滤光片经膜层性能测试,基本满足告警系统的要求。
In order to meet the imaging needs of UV alarm system and realize the detection of photon images in the blind spot of solar spectrum, a UV imaging filter was developed. A method of heating evaporation and ion assisted deposition (IAD) by using electron beam (EB) is used to coat thin films of hafnium oxide, magnesium fluoride and ultraviolet silicon dioxide on fused quartz (JGS1) substrate, And the extreme value method to monitor the thickness of the film. The ultraviolet filter which satisfies the transmission in the wavelength band of 240-280 nm and the wavelength in the range of 300-620 nm at the incident angle of 0 ° -25 ° is plated. Through the optimization of film design and process parameters to solve the film stripping, film thickness control, material absorption and other issues. The filter prepared by the film performance test, the basic alarm system to meet the requirements.