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以矢量严格耦合波(RCWA)理论为基础,通过遗传算法优化设计了圆柱形ZnSe亚波长微增透结构,获得了具有较好增透效果的结构参数;重点讨论分析了实际加工过程中圆柱形方向偏差及整体面形轮廓偏差对抗反射特性的影响;还对多台阶ZeSe增透性能随高度的变化进行了分析。结果表明:当圆柱形微结构周期为3.3μm,高度为1.7517μm,占空比为0.7566时,在8~14μm波段范围具有较好的整体增透效果;占空比偏差,高度偏差及圆柱体面形轮廓偏差对结构的平均透射性能都具有较大的影响;圆锥形ZnSe微结构的透射性能随着高度和划分层数的增加呈现一定的规律分布,且相比圆柱形最优微结构,平均透射性能有了较大幅度的提高。
Based on the RCWA theory, cylindrical ZnSe subwavelength microarray structure was optimized by genetic algorithm, and the structural parameters with good antireflection effect were obtained. The effects of cylindrical shape The direction deviation and the influence of the overall profile deviation on the anti-reflection characteristics; the variation of the ZeSe permeability of the multi-step with the height is also analyzed. The results show that when the cylindrical microstructure has a periodicity of 3.3μm, a height of 1.7517μm and a duty cycle of 0.7566, it has a good overall enhancement effect in the wavelength range of 8-14μm. The duty cycle deviation, the height deviation and the cylindrical surface The transmission of the conical ZnSe microstructure shows a regular distribution with the height and the number of divided layers. Compared with the cylindrical microstructure, the mean Transmission performance has been greatly improved.