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采用化学溶液沉积法在LaNiO3涂布的硅晶片上制备了高度(100)择优取向,表面均匀、平整、致密无裂纹的PbZr0.5Ti0.5O3/PbZr0.4Ti0.6O3双层膜.双层膜具有单一的钙钛矿相,同时拥有良好的铁电性能,剩余极化强度高达64μC/cm2,平均矫顽场仅为43.6 kV/cm.棱镜-薄膜耦合实验结果表明PbZr0.5Ti0.5O3/PbZr0.4Ti0.6O3双层膜系表现出平板光波导特征,能够承载四个横电模;通过求解模式本征方程分别得到了PbZr0.4Ti0.6O3膜层和PbZr0.5Ti0.5O3膜层的折射率及厚度参数.
A PbZr0.5Ti0.5O3 / PbZr0.4Ti0.6O3 bilayer was deposited on LaNiO3-coated silicon wafers by chemical solution deposition method. The bilayers had The single perovskite phase has good ferroelectric properties with a residual polarization of 64μC / cm2 and an average coercive field of only 43.6 kV / cm. The results of prism-film coupling experiment show that PbZr0.5Ti0.5O3 / The 4Ti0.6O3 bilayer films exhibit the characteristics of slab optical waveguides and can carry four transverse electric modes. The refractive index of PbZr0.4Ti0.6O3 and PbZr0.5Ti0.5O3 layers are obtained by solving the model intrinsic equations. Thickness parameters.