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随着电子技术及半导体工业的迅速发展,出现了许多记录电子束的材料。除卤化银材料外,还有光刻胶,热塑材料,液晶等。卤化银材料与光刻胶虽有较高的灵敏度及分辨力,但需要湿法显影、定影,暗室操作,使用不方便。液晶虽手续简单,能及时显示,但分辨力低。且不能贮存图像。热塑材料虽能实时显示和记录图像,但需要比较复杂的纹影光学系统,对记录材料的光学质量要求很高,难于达到。近年来我们研制的酸敏变色片则具有多种优点。它具有较高的灵敏度,达7.2×10~(-3)焦耳/cm~2,分辨力不低于500线对/mm,无
With the rapid development of electronic technology and semiconductor industry, many materials have been recorded for electron beam. In addition to silver halide materials, there are photoresist, thermoplastic materials, such as liquid crystal. Silver halide materials and photoresists, although higher sensitivity and resolution, but the need for wet development, fixing, darkroom operation, the use of inconvenient. Although the LCD is simple, timely display, but low resolution. And can not store images. Although thermoplastics can display and record images in real time, it requires complicated optical lithography system, which requires high optical quality of recording materials and is difficult to achieve. In recent years, we developed the acid-sensitive discoloration has a variety of advantages. It has a high sensitivity, up to 7.2 × 10 ~ (-3) Joules / cm ~ 2, resolution of not less than 500 lines to / mm, no