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为了满足应用激光位移传感器进行位移测量时的精度要求,分析了齿轮表面倾斜对激光位移传感器测量精度的影响。根据探测器信噪比与输出灰度值成正比,提出了光斑分布非线性加权和线性插值联合的重心校正算法,使高灰度值像素在光斑重心定位的贡献总体增大,其增长规律具有非线性特征。经量块组合实验表明:当物面粗糙度Ra小于0.4μm时,本校正法相对于传统的灰度重心算法,在物面倾斜角小于35°时位移测量精度能提高40%以上,在物面倾斜角为47°~75°时位移测量精度能提高30%以上,有效地减小了物面倾斜引起的位移检测误差。
In order to meet the requirement of laser displacement sensor for displacement measurement, the influence of gear surface tilt on the measurement accuracy of laser displacement sensor is analyzed. According to the signal-to-noise ratio of the detector is proportional to the output gray value, the center-of-gravity correction algorithm combining non-linear weighted spot and linear interpolation is proposed. The contribution of high-grayscale pixels in the spot center of gravity is generally increased. Nonlinear features. The result of measuring block combination experiment shows that when the surface roughness Ra is less than 0.4μm, compared with the traditional gray center of gravity algorithm, this calibration method can improve the displacement measurement accuracy by more than 40% when the object inclination angle is less than 35 °. When the tilt angle is 47 ° ~ 75 °, the displacement measurement accuracy can be improved by more than 30%, effectively reducing the displacement detection error caused by the object tilt.