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随着科学技术的发展,光学薄膜在各个领域中得到了广泛的应用。在薄膜系统中,常用的是经典的λ_0/4膜系。这种膜系厚度整齐,都是1/4波长的整数倍厚度。因此,这种厚度制备和监控方便,采用光学极值法和波长调制法就能成功地进行监控。但是,光学薄膜的应用日益广泛,对膜系的特性提出各种新的要求,采用经典的λ_0/4膜系已不能满足,而必须是任意厚度的新膜系。例如:在激光技术中,要求可见区和1.06微米减反射膜系,这种膜系的厚度必须是不整齐的。另外,当必须使膜堆的光学导纳匹配以降低其光学损失时,也应是非λ_0/4的膜系。任意厚度的膜系具有优良的光学
With the development of science and technology, optical films have been widely used in various fields. In the film system, the classic λ_0 / 4 film system is commonly used. The thickness of the film system tidy, are an integral multiple of 1/4 wavelength thickness. Therefore, this thickness is easy to prepare and monitor and can be successfully monitored using optical extrema and wavelength modulation. However, the application of optical films is becoming more and more widespread. Various new requirements have been put forward on the characteristics of film systems. The use of the classical λ_0 / 4 film system can not be satisfied, but the new film system must be of any thickness. For example, in laser technology, the visible region and the 1.06 micron anti-reflection film system are required. The thickness of the film system must be irregular. In addition, when the optical admittance of the stack needs to be matched to reduce its optical loss, it should also be a non-λ_0 / 4 film system. Film systems of any thickness have excellent optics