采用Needle法,对全内腔绿光He-Ne激光器膜系进行设计,并给出了所设计膜系的光谱性能。利用离子溅射镀膜技术镀制了所设计的膜片并且给出了测量结果。制备了多种规格的全内腔绿光He-Ne激光器并且讨论了相关工艺。其中腔长420 mm的全内腔绿光He-Ne激光器的典型输出光功率为3 mW(单模),腔长360 mm的典型输出光功率为2 mW(单模),腔长240 mm的典型输出光功率为1 mW(单模),腔长100 mm的小短管子也能有0.1 mW的出光功率。 The Needle method was used to design the full cavity green He-Ne laser film system, and the spectral performance of the designed film system was given. The designed diaphragm was plated by ion sputtering technique and the result was given. A variety of full-cavity green He-Ne lasers have been fabricated and related processes have been discussed. The typical lumen output power of a full cavity green He-Ne laser with a cavity length of 420 mm is 3 mW (single mode) and the typical output optical power with a cavity length of 360 mm is 2 mW (single mode) with a cavity length of 240 mm A typical output optical power of 1 mW (single mode), the short cavity of 100 mm long tube can also have a light output power of 0.1 mW.