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离子镀技术作为物理气相沉积(PVD)表面改性的一种手段,由于其优良的工艺特性(如处理温度低、沉积速率高及适用范围广等)以及获得的镀膜具有良好的附着性、致密性和均布性而日益得到广泛的应用。如离子镀Ti膜等已作为耐特殊介质腐蚀保护层,离子镀Al_2O_3,SiO_2等镀膜对于抗高温腐蚀有良好效果,TiN涂层具有很好的耐蚀性,又是很好的表面耐磨强化层,也将得到应用。本工作DML-500A型离子镀膜机在抛光的A3钢和18-8(1Cr18Ni8)不锈钢基材上分别沉积Ti和TiN膜,采用室温下极化曲线测定法研究了镀膜工艺(主要是负偏压作用)以及添加微量稀土元素对镀膜结构和耐蚀性的影响。
Ion plating technology as a means of physical vapor deposition (PVD) surface modification, due to its excellent process characteristics (such as low processing temperature, high deposition rate and wide range of applications, etc.) and the obtained coating has good adhesion, dense Sexual and uniform and increasingly widely used. Such as ion plating Ti film has been as a special medium resistant to corrosion protective layer, ion plating Al_2O_3, SiO_2 and other coatings for high temperature corrosion has a good effect, TiN coating has good corrosion resistance, but also a very good surface wear-resistant Layer, will also be applied. In this work, Ti and TiN films were deposited on the polished A3 steel and 18-8 (1Cr18Ni8) stainless steel substrates by DML-500A ion plating machine. The coating process (mainly negative bias voltage Effect) and adding a trace amount of rare earth elements on the coating structure and corrosion resistance.