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研制了一种新型的光栅位移传感器， 它采用了一种被作者称为正弦微窗光栅的新元件作为指示光栅， 用于消除光栅信号中的高次谐波。所谓正弦微窗光栅是一种由许多微小的正弦窗孔排列组成的光栅。介绍了采用光学图形发生器和刻蚀镀膜工艺制造这种光栅的方法， 并将制成的正弦微窗光栅用于光栅位移传感器的设计。实验表明， 新型传感器能够很好地抑制光栅信号中的高次谐波， 可将高次谐波总量降至基波的２％ 以下。
A new type of grating displacement sensor is developed, which uses a new element called the sinusoidal micro-window grating by the author as an indicator grating for eliminating higher harmonics in the grating signal. The so-called sinusoidal micro-window grating is a grating composed of many tiny sinusoidal window arrangement. The method of fabricating this kind of grating by optical pattern generator and etching coating is introduced. The fabricated sine micro - window grating is used in the design of grating displacement sensor. Experiments show that the new sensor can restrain the high harmonics in the grating signal well and reduce the total harmonic content below 2% of the fundamental wave.