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由于大直径晶圆的加工具有严格的逗留时间约束和时间波动,使得组合设备的调度及其可行性的验证存在很大的困难,而仿真是一个有效的方法.如果组合设备的调度存在可行性,那么,通过仿真能够找到系统的可行调度.利用eM-Plant建立了虚拟的单臂组合设备,该系统是可重配置的.不同类型的晶圆加工具有不同的晶圆流模式和加工时间,该虚拟组合设备能够模拟不同的晶圆加工,而参数化的虚拟组合设备实现了可重用性.为了实现可视化,建立了三维模型的虚拟组合设备.对于操作组合设备的工程人员来说,该系统是直观和有效的.最后,通过例子验证了虚拟组合设备是可行的.
Because the processing of large-diameter wafers has strict constraints of staying time and time fluctuation, it is very difficult to verify the scheduling and feasibility of the combined devices, and the simulation is an effective method.If the scheduling of the combined devices is feasible , Then via simulation we can find out the feasible scheduling of the system.Using eM-Plant to establish a virtual single arm assembly system, the system is reconfigurable.Different types of wafer processing have different wafer flow patterns and processing time, The virtual combination device can simulate different wafer processing, and the parameterized virtual combination device achieves the reusability.In order to realize the visualization, a virtual combination device of the three-dimensional model is established, and for the engineer who operates the combination device, the system Is intuitive and effective.At last, the virtual composite device is verified by examples.