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为了满足生物类等样品对大工作距和高分辨率共焦显微镜的需求,将分光瞳技术与激光共焦显微技术结合应用到成像系统上。阐述了激光分光瞳共焦显微成像原理,首次成功搭建了相应的显微镜成像测量系统。理论分析和实验表明:分光瞳共焦显微技术独特的非共轴结构使系统的轴向分辨力是相同数值孔径物镜单轴系统的3倍以上,对理论高度为100nm的台阶样品进行成像测试,得到的样品三维形貌,成像质量良好。
In order to meet the needs of biological and other samples for large working distance and high-resolution confocal microscope, split pupil technology and laser confocal microscopy were applied to the imaging system. The principle of laser pupil confocal microscopy imaging is expounded. For the first time, the corresponding microscopic imaging measurement system has been built successfully. The theoretical analysis and experiments show that the unique non-coaxial structure of the pupil confocal microscope makes the axial resolution of the system more than 3 times that of the same numerical aperture objective uniaxial system, and the imaging test of the step sample with the theoretical height of 100 nm yields the The three-dimensional morphology of the sample, the imaging quality is good.