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为实现微型化、低功耗、低成本和高灵敏度的磁传感器,提出了一种基于微型磁扭摆结构的磁传感器,并利用对角度变化非常敏感的差分电容检测技术对磁扭摆的扭转角度进行检测.设计的磁传感器包括微扭摆结构、磁性敏感薄膜和差分检测电容等部分.分析了器件的磁敏感原理和电容检测原理,给出了器件的结构参数和综合设计考虑.利用体硅加工工艺成功制作出了磁传感器样品,并进行了实验测试.测试结果表明磁传感器有良好的线性度和重复性,其磁场检测的电容灵敏度可达到0.2 fF/Gauss.根据对磁传感器的热噪声分析,可得到磁传感器最小可分辨的磁场为6.72μT.该磁传感器结构简凑、工艺简单,无需电流激励,大大降低了磁传感器功耗.
In order to realize the miniaturization, low power consumption, low cost and high sensitivity of the magnetic sensor, a magnetic sensor based on the miniature magnetic torsion structure is proposed, and the torsional angle of the magnetic torsion is determined by the differential capacitance detection technology which is very sensitive to the angle variation The design of the magnetic sensor includes a micro-wobbling structure, a magnetically sensitive film and a differential detection capacitor, etc. The principle of the magnetic sensitivity and the capacitance detection of the device are analyzed, and structural parameters and comprehensive design considerations of the device are given.Using bulk silicon processing technology The magnetic sensor samples were successfully fabricated and tested experimentally.The test results show that the magnetic sensor has a good linearity and repeatability and the capacitance sensitivity of the magnetic field detection can reach 0.2 fF / Gauss.According to the thermal noise analysis of the magnetic sensor, Magnetic sensor can be obtained minimum resolution of 6.72μT magnetic field of the magnetic sensor has the advantages of simple structure, simple process, no current excitation, greatly reducing the magnetic sensor power consumption.