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为了克服传统光学镜面抛光方法的缺点,提出了应用离子束进行光学镜面修形的方法。介绍了离子束修形技术的原理和方法,并对离子束修形中涉及的关键技术进行了讨论。在自研的离子束修形设备上对一块直径98mm的微晶玻璃平面样件进行了离子束修形试验,经过两次的迭代修形使其面形精度均方根误差由初始的0.136λ提高到0.010λ(λ=632.8nm),平均每次迭代的面形收敛率达到3.7。实验结果表明,应用离子束进行光学镜面修形无边缘效应、面形收敛快、加工精度高;由于离子束修形技术去除材料过程自身的特点,使数控离子束修形技术对非球面的加工和对平面的加工难度相当。
In order to overcome the shortcomings of the conventional optical mirror polishing method, a method of applying the optical mirror to shape the mirror is proposed. The principle and method of ion beam modification are introduced, and the key technologies involved in ion beam modification are discussed. In a self-developed ion beam modification equipment, a piece of 98mm diameter glass-ceramics flat sample was subjected to ion beam modification test. After twice iterative modification, the root mean square error of surface shape accuracy increased from 0.136 λ increased to 0.010λ (λ = 632.8nm), and the average surface area convergence rate of each iteration reached 3.7. The experimental results show that the application of ion beam for optical mirror surface modification has no edge effect, fast convergence of surface shape and high processing precision. Due to the characteristics of material process removed by ion beam modification technology, the processing of aspheric surface by NC ion beam modification technology And the difficulty of processing the plane quite.