Preparation and properties of tungsten-doped indium oxide thin films

来源 :稀有金属：英文版 | 被引量 : 0次 | 上传用户：edisonckw

【摘要】

：

Tungsten-doped indium oxide (IWO) thin films were deposited on glass substrate by DC reactive magnetron sputtering. The effects of sputtering power and growth t

【作者】

：

Li Yuan Wang Wenwen Zhang

【机构】

：

DepartmentofPhysics

【出处】

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稀有金属：英文版

【发表日期】

：

2012年2期

【基金项目】

：

supported by the National Natural Science Foundation of China (No. 50902006),,the National High Technology Development 863 Program of China (No.2009AA03Z428)

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Tungsten-doped indium oxide (IWO) thin films were deposited on glass substrate by DC reactive magnetron sputtering. The effects of sputtering power and growth temperature on the structure, surface morphology, optical and electrical properties of IWO thin

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Preparation and properties of tungsten-doped indium oxide thin films

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