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介绍了带宽系列为30~40nm 的硬膜矩形化带通滤光片的设计和制造方法。采用七半波膜系以获得矩形化程度较高的通带波形和深度的背景抑制特性(OD5~OD6),结合工艺特性和允差模拟分析对膜系进行优化设计。采用光学过正极值法监控膜厚,采用非球面夹具解决膜厚均匀性问题,文中给出了设计和测试结果
The design and manufacture method of hard rectangular rectangular bandpass filter with bandwidth range 30 ~ 40nm are introduced. Seven half-wave films were used to obtain the high degree of rectangularization. The background suppression characteristics (OD5 ~ OD6) of the passband and the depth were optimized. The film system was optimized by the combination of process characteristics and tolerance analysis. Using optical positive extremum method to monitor the film thickness, the use of non-spherical fixture to solve the problem of film thickness uniformity, the paper gives the design and test results