本文通过对铝金属化中产生尖角(Spear)的工艺因素的分析,提出了一项可防止尖角的新工艺法,其要点是通过蒸铝来清除接触窗口内的自然氧化层,从而可在低于350℃的合金温度下实现均匀良好的——硅欧姆接触。 Based on the analysis of process factors that produce Spear in the metallization of aluminum, a new technique to prevent sharp corners is proposed. The main point of this paper is to remove the natural oxide layer in the contact window by steaming aluminum. A well-well-to-silicon ohmic contact is achieved at alloy temperatures below 350 ° C.