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研究了工作气体分压比、总气压、充电电压及输出镜反射率对激光单脉冲能量、脉冲宽度及峰值功率的影响。实验结果表明:对于输出能量,工作介质SF6和D2的分压比为10∶1及输出镜反射率为30%时最佳,正常辉光放电状态下提高充电电压有利于增加单脉冲能量,且对于每个电压存在使能量最大的最佳气压值。激光脉冲宽度随工作气体分压比及总气压的增大不断变窄,但随充电电压和输出镜反射率的升高不断变宽。综合考虑输出能量和激光脉宽,激光峰值功率的总体变化趋势与能量一致,但二者取得最大值所对应的气体参数及输出镜参数存在差别。
The effects of working gas partial pressure ratio, total pressure, charging voltage and output mirror reflectivity on the laser single pulse energy, pulse width and peak power were studied. The experimental results show that for the output energy, the partial pressure ratio of the working medium SF6 and D2 is 10: 1 and the reflectivity of the output mirror is 30%, and increasing the charging voltage in the normal glow discharge state is advantageous for increasing the single-pulse energy, and For each voltage, there is an optimum pressure value that maximizes the energy. The laser pulse width narrows with the increase of working gas partial pressure ratio and total pressure, but widens with the increase of charging voltage and output mirror reflectivity. Taking into account the output energy and laser pulse width, the overall trend of laser peak power is consistent with the energy, but there is a difference between the gas parameters and the output mirror parameters corresponding to the maximum of the two.