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In this paper, a new light scattering method for measuring t he roughness of random surfaces is proposed. The method is based on the relation between the specularly reflected intensity I s, i.e., the central δ-peak intensity and wave vector component k z. The linear fit of the logarithm graph of the normalized central δ-peak intensity I sr versus k-2 z, whose variation is induced by changing illuminating wavelength, gives the square of the surface roughness w. The roughnesses of 6 silicon backside samples were measured.
In this paper, a new light scattering method for measuring t he roughness of random surfaces is proposed. The method is based on the relation between the specularly reflected intensity I s, ie, the central δ-peak intensity and wave vector component k z. The linear fit of the logarithm graph of the normalized central δ-peak intensity I sr versus k-2 z, whose variation is induced by changing the illuminating wavelength, gives the square of the surface roughness w. The roughnesses of 6 silicon backside samples were measured .