Based on Lucovsky equation,the response solution of 1-D position sensitive detector(PSD) is given under the condition of parallel light oblique incidence and Gaussian beam oblique incidence,and the response characteristics are analyzed by numerical calculation. The relation between oblique incident angle and output current is introduced and illustrated. Based on Lucovsky equation, the response solution of 1-D position sensitive detector (PSD) is given under the condition of parallel light oblique incidence and Gaussian beam oblique incidence, and the response characteristics are analyzed by numerical calculation. The relation between oblique incident angle and output current is introduced and illustrated.