采用微区Ｒａｍａｎ 散射分析方法研究化学气相沉积法制备的金刚石膜的横截面．金刚石膜从衬底面到生长面不同位置具有不同特征的Ｒａｍａｎ 谱，依此对膜中的金刚石、石墨和非晶碳成分进行分析．衬底面附近区域对应金刚石膜生长过程的成核阶段，非晶碳成分含量较高，相应于１２００ —１６００ ｃｍ － １ 波段较大的散射强度和存在较强的荧光背底．膜厚增大，非晶碳成分中ｓｐ３ 结构成分首先减少，而ｓｐ２ 结构成分和石墨成分的减少相对缓慢．而生长面附近区域只有比较单纯的晶体金刚石Ｒａｍａｎ 峰．激发光沿平行于金刚石膜面扫描所得到的Ｒａｍａｎ 谱，显示了金刚石晶粒与晶界区域结构和成分的差别 Cross-section of diamond films prepared by chemical vapor deposition was investigated by Raman scattering analysis. The diamond films have different characteristics of Raman spectra at different positions from the substrate surface to the growth surface, so the diamond, graphite and amorphous carbon components in the film are analyzed. The region near the substrate surface corresponds to the nucleation stage of the diamond film growth process, and the amorphous carbon content is high, which corresponds to the larger scattering intensity in 1200-1600 cm - 1 band and the presence of strong fluorescent backer. As the film thickness increases, the sp3 structure components in the amorphous carbon components decrease first, while the sp2 structure components and the graphite components decrease relatively slowly. In the area near the growth surface, there is only a relatively simple crystalline diamond Raman peak. The Raman spectrum of the excitation light scanned parallel to the diamond film surface shows the difference between the structure and composition of diamond grains and grain boundary regions