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本文简述了PCVD技术的原理、特性、设备。并对其制备的TiN、TiC、Ti(C_xN_y)超硬膜进行了显微硬度和化学成份等分析,最后介绍了该项技术在冷挤压冲头上的应用实例。
This paper briefly describes the principle, characteristics and equipment of PCVD technology. The microhardness and chemical composition of TiN, TiC, Ti (C_xN_y) superhard films prepared by the method were also analyzed. Finally, the application of the technology on the cold extrusion punch was introduced.