,Pressure effects in AlAs/InxGa1-xAs/GaAs resonant tunnelling diodes for application in micromachine

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This paper reports the current-voltage characteristics of [001]-oriented AlAs/InxGal-xAs/GaAs resonant tunnelling diodes (RTDs) as a function of uniaxial exteal stress applied parallel to the [110] and the [110] orientations,and the output characteristics of the GaAs pressure sensor based on the pressure effect on the RTDs. Under [110]stress, the resonance peak voltages of the RTDs shift to more positive voltages. For [110] stress, the peaks shift toward more negative voltages. The resonance peak voltage is linearly dependent on the [110] and [110] stresses and the linear sensitivities are up to 0.69 mV/MPa,-0.69 mV/MPa respectively. For the pressure sensor, the linear sensitivity is up to 0.37 mV/kPa.
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