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笔者通过进行磨料水射流车削多晶硅片的试验研究,说明了磨料水射流车切多晶硅这类脆性材料的可行性。磨料水射流车削多晶硅的表面质量主要受射流压力、进给速度、靶距和主轴转速的影响。在正交试验设计的基础上,采用回归分析方法,在磨料水射流车削多晶硅过程中,建立了主要加工工艺参数对表面粗糙度影响模型。通过对该模型的相关指标的分析表明,回归方程有一定指导意义。该模型为合理选择磨料水射流车削工艺参数提供了理论基础,在半导体制造业具有较大应用价值。
The author through the abrasive water jet cutting polycrystalline silicon experimental study shows that abrasive water jet cutting polysilicon such brittle materials feasibility. Abrasive water jet turning Polysilicon surface quality is mainly affected by jet pressure, feed rate, target distance and spindle speed. On the basis of orthogonal experimental design, the regression analysis method was used to establish the model of the influence of the main processing parameters on the surface roughness in the process of cutting polycrystalline silicon with abrasive water jet. Through the analysis of the relevant indicators of the model, the regression equation has some guiding significance. The model provides a theoretical basis for the reasonable choice of abrasive water jet turning process parameters, and has great application value in the semiconductor manufacturing industry.