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针对功率VDMOS器件抗单粒子辐射加固技术在空间辐射环境下的要求,从重粒子对VDMOS器件的辐射机理及作用过程出发,归纳出功率VDMOS器件抗单粒子辐射加固的三类技术:屏蔽技术、复合技术和增强技术。综述了国内外功率VDMOS器件这三类抗单粒子辐射加固技术的研究进展,为半导体器件抗单粒子辐射加固技术研究提供了参考。
Aiming at the requirements of VDMOS devices in radiation protection of space environment, the radiation mechanism and action process of VDMOS devices are summarized. Three kinds of technologies to resist single-particle radiation in power VDMOS devices are summarized: shielding technology, compounding Technology and enhanced technology. The research progress of three types of anti-mononuclear radiation (IR) radiation strengthening technologies for power VDMOS devices at home and abroad is reviewed. It provides a reference for the study of anti-single-particle radiation reinforcement technology for semiconductor devices.