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本文首先对各种集成光学透镜作了介绍,并对它们的优缺点进行了比较。 其次,本文对反射型变周期光栅透镜(RCGL)的原理和设计给予了详细的讨论,而且对RCGL的衍射效率和焦斑性质在理论上进行了较为彻底的研究。理论表明。RCGL的性能因光栅齿形和齿高的不同而不同,其中,以锯齿形齿的RCGL效果最好。无论何种齿形RCGL,如果齿高不理想,可失去聚焦效应。 我们制作了适用于扩Ti:LiN_bO_3波导的RGGL,它是以Si片为衬底,焦距为15mm,光栅面积为1.5mm×1.5mm。 实验结果表明:所制作的RCGL效果良好,衍射效率为14.4％,焦斑宽度(-3dB)为11μm,焦距值与设计符合良好。
This paper first introduces various kinds of integrated optical lenses, and compares their advantages and disadvantages. Secondly, the principle and design of reflective variable period grating lens (RCGL) are discussed in detail in this paper, and the diffraction efficiency and focal spot properties of RCGL are theoretically studied thoroughly. Theory shows. The performance of RCGL varies with grating profile and tooth height, with RCGL with zigzag teeth being the best. No matter what kind of toothed RCGL, if the tooth height is not ideal, you can lose the focusing effect. We made RGGL suitable for Ti: LiN_bO_3 waveguide. It is based on Si wafer with focal length of 15mm and grating area of 1.5mm × 1.5mm. The experimental results show that the produced RCGL has a good effect, the diffraction efficiency is 14.4%, the focal spot width (-3dB) is 11μm, and the focal length value is in good agreement with the design.