论文部分内容阅读
为研究基于128°YX-LiNbO_3的表面声波谐振器的结构参数对器件性能的影响,利用COMSOL有限元分析软件对谐振器结构进行多物理域耦合建模与仿真.通过特征频率分析表面声波谐振器结构的叉指敷金比、金属电极厚度、金属电极均匀性和压电基底厚度对特征频率的影响;通过频率响应分析,获得输入电导与频率之间的关系以及旋转角速率与特征频率之间的关系.结果表明:随着叉指换能器敷金比的逐渐增大,对称模态和反对称模态的特征频率迅速减小,压电基底的厚度在大于一个波长时对特征频率影响较小;加入旋转角速率,得到特征频率随旋转角速度的变化关系呈线性关系.
In order to study the influence of the structure parameters of the 128 ° YX-LiNbO_3 based surface acoustic wave resonator on the performance of the device, COMSOL finite element analysis software was used to simulate and simulate the resonator structure through multiphysics coupling. By using the characteristic frequency analysis of surface acoustic wave resonator The structure of the finger gold ratio, the thickness of the metal electrode, the uniformity of the metal electrode and the piezoelectric substrate thickness on the characteristic frequency; through the frequency response analysis, the relationship between the input conductance and frequency and the relationship between the angular rate of rotation and the characteristic frequency The results show that the characteristic frequency of the symmetric modal and the anti-symmetric modal decreases rapidly with the increasing of the gold deposition ratio of the interdigital transducer. The thickness of the piezoelectric substrate has less effect on the characteristic frequency when the thickness of the piezoelectric substrate is greater than one wavelength When the rotational angular velocity is added, the relationship between the characteristic frequency and the rotational angular velocity is linear.