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光刻机工件台是光刻机的关键子系统,其中的线管组件是其传输信号、动力及冷却液等必不可少的组成部分。线管组件产生的扰动力会恶化工件台系统的超精密运动性能,因此抑制线管组件扰动力对提高工件台系统的运动性能具有重要意义。该文以工件台系统的子系统掩模台系统的线管组件为例,以减小线管组件扰动力波动、提高掩模台运动性能为目的,建立了线管组件有限元模型,对线管组件的主要结构参数进行了优化,提出了线管组件优化的一些准则,并进行了实验验证。实验表明:该有限元模型与实验相比的一阶频率误差在10%以内,验证了模型的准确性。仿真实验结果表明:优化后的线管组件L向扰动力波动幅值减小80%。
Lithography The workpiece stage is the key subsystem of a lithography machine, of which the bobbin assembly is an integral part of its transmission of signals, power and coolant. The disturbance generated by the bobbin assembly will deteriorate the ultra-precision motion performance of the workpiece stage system. Therefore, it is of great significance to suppress the disturbance of the bobbin assembly to improve the movement performance of the workpiece table system. In this paper, taking the bobbin assembly of the subsystem mask system of the workpiece stage system as an example, the finite element model of the bobbin assembly is established for the purpose of reducing the disturbance fluctuation of the bobbin assembly and improving the movement performance of the mask table. The main structural parameters of the pipe assembly are optimized, some guidelines for the optimization of the pipe assembly are proposed, and the experimental verification is carried out. Experiments show that the first-order frequency error of the finite element model is less than 10% compared with the experiment, which verifies the accuracy of the model. The simulation results show that the amplitude of the disturbance disturbance fluctuates 80% after the optimization of the line component.