集成电路是多工序(每道工序的加工成本相当高)的产品.在生产过程中对硅片加工质量进行检测,及早剔除不合格的硅片有利于降低加工成本;而对检测所得结果进行统计分析,追查原因,研究对策则有利于提高企业的质量管理水平和工艺水平.随着集成电路向大规模、超大规模方向发展,大块半 Integrated circuit is a multi-process (each process costs quite high) products.In the production process of wafer processing quality testing, early removal of unqualified silicon is conducive to reducing processing costs; and the results of the test statistics Analysis, tracing the reasons, research strategies will help improve the quality of enterprise management and technology level.With integrated circuits to large-scale, large-scale direction, large and a half