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利用多台阶圆柱结构近似与严格的耦合波理论研究了化学方法制作出来的新型的半球结构的亚波长光栅的光学性质,此光栅制作技术简化了可见光波段光栅的制作工艺.通过计算机模拟与数值计算,证明了半球结构亚波长光栅具有良好的抗反射性能.给出了两种光栅设计方案.第1种方案下,光栅能够达到3.4416×10?7的低反射率,适用波段为0.46~0.7μm,入射角变化范围为±12°;第2种方案下,光栅的适用范围较广,适用波段为整个可见光波段,入射角变化范围为±23°,所能达到的最低反射率为3.112×10?4.
The optical properties of a new type of sub-wavelength grating fabricated by chemical method were studied by using the approximation and strict coupled-wave theory of multi-step cylindrical structures. The grating fabrication technique simplified the fabrication process of the visible band grating. By computer simulation and numerical calculation , It is proved that the sub-wavelength grating with hemispherical structure has good antireflection performance.Furthermore, two grating designs are given.In the first scheme, the grating can achieve a low reflectivity of 3.4416 × 10 -7, and the applicable band is 0.46~0.7 μm , The variation range of incident angle is ± 12 °; Under the second kind of scheme, the grating has a wide range of application, the applicable band is the entire visible light band, the variation range of incident angle is ± 23 °, and the lowest reflectance that can be achieved is 3.112 × 10 4.