Zn nanodot array was prepared by using a nano-masking with porous alumina membrane as mask. Based on such a nanodot array, a self-catalysis method was developed for fabricating ZnO nanopillars on Si substrate. The resultant nanopillars show a two-dimensional, and regular array with uniform size and orientation. Zn nanodot array was prepared by using a nano-masking with porous alumina membrane as mask. Based on such a nanodot array, a self-catalysis method was developed for fabricating ZnO nanopillars on Si substrate. The resultant nanopillars show a two-dimensional, and regular array with uniform size and orientation.