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分析了共焦显微系统(CMS)离焦状态工作时分辨特性的变化,指出了离焦状态是导致CMS横向分辨特性变差的主要影响因素之一。提出并采用了位相型超分辨光瞳滤波技术来改善CMS工作在离焦状态下的横向分辨特性,分析了超分辨光瞳滤波器位置变化对CMS横向分辨特性的影响。理论分析和实验验证表明,位相型超分辨光瞳滤波技术的引入,显著抑制了CMS工作在离焦状态时艾里斑旁瓣的增长,克服了CMS因工作在离焦状态而引起的横向分辨特性下降的缺点。
The change of resolving characteristics of the confocal microscopy (CMS) working in defocused state was analyzed. It was pointed out that the out of focus state is one of the main factors that lead to the deterioration of the CMS lateral resolution. Proposed and adopted the phase-resolved super-resolution pupil filter technology to improve the CMS’s lateral resolution characteristics under defocused conditions, and analyzed the influence of the super-resolution pupil filter position changes on the CMS transverse resolution characteristics. Theoretical analysis and experimental verification show that the introduction of phase-type super-resolution pupil filter technology significantly suppresses the growth of Airy’s side lobes when CMS operates in defocus state, and overcomes the problem of horizontal resolution of CMS due to working in defocused state Disadvantages of reduced features.