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本文采用商用532 nm激光器作为基频光源,利用偏硼酸钡(β-BBO)晶体进行外腔倍频,实现了266 nm连续激光的高效输出.文中详细模拟了BBO晶体中的束腰形状对倍频效率的影响,仿真和实验结果均表明椭圆高斯光束可以有效改善走离效应,提高倍频转换效率.通过优化蝶形倍频腔,可以使椭圆高斯光束在腔内共振,当1 W基频光输入时可输出约180 mW的266 nm紫外连续激光,倍频转换效率达到18%.
In this paper, a commercially available 532 nm laser is used as the fundamental light source, and the HBO (β-BBO) crystal is used for frequency doubling in the external cavity to achieve the high-efficiency output of a 266 nm continuous laser. The simulation results and the experimental results show that the elliptical Gaussian beam can effectively improve the walk-off effect and improve the frequency-doubling frequency conversion efficiency. By optimizing the butterfly frequency doubling cavity, the elliptical Gaussian beam can be resonated in the cavity. When 1 W fundamental frequency When the light input can output about 180 mW 266 nm UV continuous laser, multiplier conversion efficiency of 18%.