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电子辐照加速器的真空系统是整个加速器正常运行的关键,加速管内的残余气体分子可对电子束产生较大影响,尤其是惰性气体等大分子气体。以往的加速器真空系统采用二级溅射离子泵作为
The vacuum system of the electron irradiation accelerator is the key to the normal operation of the accelerator. The residual gas molecules in the accelerator tube can greatly affect the electron beam, especially the large molecular gases such as inert gas. The previous accelerator vacuum system used two sputtering ion pump as