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脉冲激光沉积是近年来出现的一项制备薄膜的新技术,在制备生物活性薄膜方面显示出独特的优越性。介绍了脉冲激光沉积技术的原理及特点,详细综述了反应气氛、衬底温度、激光波长、能量密度、靶材性能、沉积速率及薄膜厚度等工艺参数对羟基磷灰石及生物玻璃薄膜组织及性能的影响,展望了该项技术的应用前景。
Pulsed laser deposition is a new technique for preparing thin films in recent years. It shows unique advantages in the preparation of bioactive films. The principles and characteristics of pulsed laser deposition technology are introduced. The effects of reaction atmosphere, substrate temperature, laser wavelength, energy density, target properties, deposition rate and film thickness on the microstructure and properties of hydroxyapatite and bioglass thin film The impact of performance, and prospects of the application of the technology prospects.