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MEMS加速度传感器大幅提高了新型地震检波器的各项性能指标。利用有限元软件AN-SYS建立了悬臂硅梁的力学模型,并通过其力学性能仿真,得出优化的设计结构尺寸,即梁长L=150μm,梁宽b=40μm,梁厚h=4μm,活动电极和固定电极的间距d0取为1μm。同时利用电路仿真软件建立了传感器闭环系统的整体仿真数学模型,仿真结果表明其阶跃响应和正弦响应基本和理论分析结果吻合,传感器的分辨率可达0.001 m/s2,频带宽度可达500 MHz。该基于MEMS加速度传感器的新型地震检波器在地震勘探中将具有广阔的应用前景。
MEMS accelerometer greatly improves the performance of the new geophone. The finite element software AN-SYS was used to establish the mechanical model of the cantilever silicon beam. Through the simulation of its mechanical properties, the optimal design dimensions were obtained. The beam length was L = 150μm, the beam width was b = 40μm, the beam thickness was h = 4μm, The distance d0 between the movable electrode and the fixed electrode is taken as 1 μm. At the same time, the simulation model of the closed-loop system is established by using the circuit simulation software. The simulation results show that the step response and the sine response are consistent with the theoretical analysis. The resolution of the sensor is up to 0.001 m / s2 and the bandwidth is up to 500 MHz . The new geophone based on MEMS accelerometer will have broad application prospect in seismic exploration.